Department of Chemical and Biomolecular Engineering
Korea Advanced Institute of Science and Technology

Recent Achievements

제목

[Frontispiece] High-Resolution Patterning of Various Large-Area, Highly Ordered Structural Motifs by Directional Photofluidization Lithography: Sub-30-nm Line, Ellipsoid, Rectangle, and Circle Arrays

Seungwoo Lee, Hong Suk Kang, Jung-Ki Park*
Highlighted as a “Frontispiece” of Advanced Functional Materials, 21(10), 1770-1778 (2011)


Article first published online: 15 MAR 2011

DOI: 10.1002/adfm.201001927

http://onlinelibrary.wiley.com/doi/10.1002/adfm.201001927/abstract


Abstract

A major challenge in nanolithography is to overcome the resolution limit of conventional patterning methods. Herein, we demonstrate a simple and convenient approach to generate sub-30-nm various structural motifs with precisely controlled sizes, shapes, and orientations. The proposed method, the “directional photofluidization” of an azopolymer, follows the same philosophy as a path-changing approach, for example, thermal-reflow of polymer arrays, in that post-treatment simultaneously leads to a reduction of the feature sizes and line-edge roughness (LER) of nanostructures. However, in contrast to thermal-induced isotropic reflow, directional photofluidization provides unprecedented flexibility to control the structural features, because the direction of photofluidization can be arbitrary controlled according to the light polarization. Furthermore, this approach offers good control of the final features due to a gradual reduction in the rate of photofluidization during light irradiation. More importantly, the photofluidic behavior of the azopolymer significantly reduces the LER, and thus it can improve the quality of nanostructures. Finally, the far-field process of directional photofluidization enables hierarchical nanofabrication, in contrast to mechanical contact fabrication, because the patterned light can reconfigure the polymer arrays selectively. Our approach is potentially advantageous for the fabrication of various structural motifs with well-controlled dimensions on the nanoscale and with minimized LER.




0

추천하기

0

반대하기

첨부파일 다운로드

등록자관리자

등록일2011-08-25

조회수5,747

  • 페이스북 공유
  • 트위터 공유
  • Google+ 공유
  • 인쇄하기
 
스팸방지코드 :
사진제목
New Platform for cytochrome P450 reaction combining in situ immobilization on biopolymer.   Lee JH, Nam DH, Lee SH, Park JH, Park SJ, Lee SH, Park CB, Jeong KJ   Bioconjugate Chemistry (2014) 25(12):2101-2104.   [ABSTRACT]We describe an efficienct chemical conversion platform with in situ immobilization of P450-BM3 on poly(3-hydroxybutyrate) granules. Through fusion ...
Facile Photo-Crosslinking of Azide-Containing Hole-Transporting Polymers for Highly Efficient, Solution-Processed, Multilayer Organic Light Emitting Devices   Article first published online: 13 OCT 2014 , DOI: 10.1002/adfm.201401958   Junwoo Park, Changyeon Lee, Jihye Jung Hyunbum Kang, Ki-Hyun Kim, Biwu Ma and Bumjoon J. Kim [ABSTRACT]A novel framework of azide co...
Dual role of blue luminescent MoS2 quantum dots in fluorescence resonance energy transfer phenomenon  Hyun Dong Ha, Dong Ju Han, Jong Seob Choi, Minsu Park, and Tae Seok Seo [Abstract] Homogeneous blue luminescent MoS2 quantum dots are fabricated by using a lithium intercalation method from MoS2 nanoparticles, and the unique blue photoluminescence property is utilized in the Alexa F...
Target-controlled formation of silver nanoclusters in abasic site-incorporated duplex DNA for label-free fluorescence detection of theophylline Ki Soo Park, Seung Soo Oh, H. Tom Soh and Hyun Gyu Park [ABSTRACT] A novel, label-free, fluorescence based sensor for theophylline has been developed. In the new sensor system, an abasic site-incorporated duplex DNA probe serves as both a pocke...
 [cover] Hyelim Kang, Shin-Hyun Kim*, Seung-Man Yang, and Ji-Ho Park*, `Bio-inspired nanotadpoles with component-specific functionality,` Journal of Materials Chemistry B, 2, 6462-6466 (2014).   [ABSTRACT] We report a new class of bio-inspired nanotadpoles (NTPs) with component-specific functionalities. The plasmonic NTPs with a gold-coated head and a reactive ion e...